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Type: Journal article
Title: The microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition process
Author: Xu, S.
Munroe, P.
Xu, J.
Xie, Z.
Citation: Surface and Coatings Technology, 2016; 307:470-475
Publisher: Elsevier
Issue Date: 2016
ISSN: 0257-8972
Statement of
Song Xu, Paul Munroe, Jiang Xu, Zong-Han Xie
Abstract: Abstract not available
Keywords: Tantalum nitride coating; microstructure; mechanical property; nanoporosity; toughness
Rights: © 2016 Elsevier B.V. All rights reserved.
RMID: 0030056377
DOI: 10.1016/j.surfcoat.2016.09.015
Grant ID:
Appears in Collections:Mechanical Engineering publications

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