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Type: Journal article
Title: Vibration analysis of waffle floors
Author: Howard, C.
Hansen, C.
Citation: Computers & Structures, 2003; 81(1):15-26
Publisher: Pergamon-Elsevier Science Ltd
Issue Date: 2003
ISSN: 0045-7949
Statement of
C. Q. Howard and C. H. Hansen
Abstract: Two-way grillage or waffle floors are used extensively in semiconductor factories as they provide high impedance mounts for manufacturing equipment that is extremely vibration sensitive. This paper presents a mathematical model for the analysis of vibration at the center of a bay and the transmission of vibration along a waffle floor. The mathematical model is compared with finite element models and experimental results from several manufacturing buildings, and shows good agreement. Trends are shown for the displacement and resonance frequency of the floor as the thickness of the floor, size of the bays and the stiffness of the columns are varied.
Keywords: Vibration sensitive equipment; Waffle floors; Grillage; Semiconductor; Plate
RMID: 0020030842
DOI: 10.1016/S0045-7949(02)00348-6
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Appears in Collections:Mechanical Engineering publications
Environment Institute publications

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