The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages

Abstract

This paper presents the effect of the accuracies of flexure hinge compliance equations (the accuracies vary with a geometrical ratio, t/R of a hinge) on the output compliances of RRR and 3-RRR micro-motion stages. Closed-form output compliance models of the stages are derived (with flexure hinge compliances as one of the variables) to investigate the aforementioned effect. The output compliances, calculated using various flexure hinge equations, are compared to that of the finite element analysis (FEA) and the results are discussed. Crown Copyright © 2007.