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Type: Journal article
Title: Design and construction of the motion mechanism of an XY micro-stage for precision positioning
Author: Shimizu, Y.
Peng, Y.
Kaneko, J.
Azuma, T.
Ito, S.
Gao, W.
Lu, T.
Citation: Sensors and Actuators A-Physical, 2013; 201:395-406
Publisher: Elsevier Science SA
Issue Date: 2013
ISSN: 0924-4247
Statement of
Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien-Fu Lu
Keywords: XY micro-stage; Impact drive mechanism; PZT; Magnet; Precision positioning; Long stroke
Rights: © 2013 Elsevier B.V. All rights reserved.
RMID: 0020131322
DOI: 10.1016/j.sna.2013.08.012
Appears in Collections:Mechanical Engineering publications

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